H-shaped acoustic micro-resonator-based quartz-enhanced photoacoustic spectroscopy

An H-shaped acoustic micro-resonator (AmR)-based quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor is demonstrated for the first time. The H-shaped AmR has the advantages of easy optical alignment, high utilization of laser energy, and reduction in optical noise. The parameter of the H-shaped AmR is designed based on the standing wave enhancement characteristic. The performance of the H-shaped AmR-based QEPAS sensor system and bare quartz tuning fork (QTF)-based sensor system are measured under the same conditions by choosing water vapor (H₂O) as the target gas. Compared with the QEAPS sensor based on a bare QTF, the detection sensitivity of the optimal H-shaped AmR-based QEPAS sensor exhibits a 17.2 times enhancement.