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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
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All the lonely atoms, where do they all belong?
John R Regalbuto1, Abhaya K Datye2
1Department of Chemical Engineering, University of South Carolina, Columbia, SC, USA. regalbuj@cec.sc.edu.
Nature Nanotechnology
|February 11, 2022
Summary
No abstract available in PubMed .
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