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Updated: Oct 3, 2025

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Kiyohisa Nii1, Wataru Inami2, Yoshimasa Kawata1,2
1Graduate School of Medical Photonics, Shizuoka University, 3-5-1 Johoku, Naka, Hamamatsu 432-8011, Japan.
Researchers developed a novel electron beam-based ion-imaging system. This system achieves 216 nm spatial resolution for pH sensing, significantly outperforming light-addressable potentiometric sensors (LAPS).
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