Hybrid surface measuring system for motion-blur compensation and focus adjustment using a deformable mirror

Area of Science:

• Optics and optical devices
• Metrology and measurement
• Automation and microfabrication

Background:

• Rapid advancements in automation and microfabrication necessitate faster, more precise inspection methods.
• Existing systems for motion-blur-free imaging track only the line of sight, limiting measurements to planar surfaces.
• Previous multi-device setups for line-of-sight and focus control are bulky and complex.

Purpose of the Study:

• To develop an advanced imaging system capable of measuring non-planar surfaces on moving objects.
• To simplify the hardware requirements by utilizing a single deformable mirror for simultaneous line-of-sight and focus control.
• To enhance inspection speed and accuracy in automated manufacturing processes.

Main Methods:

• A novel system employing a single deformable mirror to simultaneously control line of sight and focus.
• Testing the system on curved and uneven surfaces moving at 20 mm/s at a distance of 140 mm.
• Comparative analysis of captured images against existing measurement techniques.

Main Results:

• Successfully acquired motion-blur-free, all-in-focus images of moving, non-planar surfaces.
• Demonstrated the system's capability to measure complex geometries previously challenging for optical inspection.
• Validated the effectiveness and superiority of the proposed single-mirror system over existing methods.

Conclusions:

• The proposed deformable mirror system enables accurate, high-speed imaging of non-planar moving surfaces.
• The system's compact design, using only one mirror, offers significant advantages for downsizing and broader application in measurement systems.
• This technology represents a significant advancement for quality control in industries reliant on precise automated inspection.