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Coarse-to-fine optical MEMS accelerometer design and simulation.

Mojtaba Rahimi, Majid Taghavi, Mohammad Malekmohammad

|February 24, 2022

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This study introduces a novel optical microelectromechanical systems (MEMS) accelerometer using a Fabry-Pérot interferometer. The design enhances sensitivity and measurement range for improved acceleration detection.

Area of Science:

Physics
Electrical Engineering
Materials Science

Background:

Microelectromechanical systems (MEMS) accelerometers are crucial for motion sensing.
Fabry-Pérot (FP) interferometers offer high sensitivity for optical measurements.
Existing MEMS accelerometers face limitations in sensitivity and linear range.

Purpose of the Study:

To propose a novel coarse-to-fine optical MEMS accelerometer.
To enhance accelerometer sensitivity and linear measurement range.
To reduce cross-axis sensitivity in MEMS accelerometers.

Main Methods:

Design of a MEMS accelerometer utilizing two Fabry-Pérot cavities.
Implementation of a coarse-to-fine measurement strategy.
Application of the dual wavelength method for enhanced performance.

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Optical simulation for performance evaluation.

Main Results:

Achieved a 10x increase in sensitivity compared to single FP cavity designs.
Demonstrated reduced cross-axis sensitivity due to insensitivity to orthogonal displacements.
Simulated mechanical sensitivity of 190 nm/g and optical sensitivity of 8 nm/g.
Obtained a linear measurement range of ±5g with a first resonance frequency of 1141 Hz.

Conclusions:

The proposed optical MEMS accelerometer design significantly improves sensitivity and linear range.
The dual wavelength and coarse-to-fine methods effectively enhance accelerometer performance.
The fiber-coupled optical system facilitates fabrication and reduces cross-axis sensitivity.