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High-performance inverted evanescently coupled waveguide integrated MUTC-PD with high response speed.

Fangli Wang, Bojian Zhang, Liang Wang

    Applied Optics
    |February 24, 2022
    PubMed
    Summary

    We developed a novel inverted evanescently-coupled waveguide modified uni-traveling-carrier photodiode (IECWG MUTC-PD). This photodiode achieves a 71.9 GHz bandwidth and high responsivity, improving space charge effects.

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    Area of Science:

    • Optoelectronics
    • Semiconductor Devices

    Background:

    • Photodiodes are crucial for high-speed optical communication.
    • Existing designs face limitations in bandwidth and responsivity due to space charge effects.

    Purpose of the Study:

    • To propose and numerically verify a new photodiode structure for enhanced performance.
    • To improve bandwidth and responsivity by mitigating space charge effects.

    Main Methods:

    • Design of an inverted evanescently-coupled waveguide modified uni-traveling-carrier photodiode (IECWG MUTC-PD).
    • Optimization of the epitaxial structure (n-i-p) and capacitance control layer.
    • Numerical simulation to analyze electric field distribution, light absorption, and performance metrics.

    Main Results:

    • Achieved a 3-dB bandwidth of 71.9 GHz with a 35µm² active area at -5V bias.
    • Obtained an internal responsivity of 0.59 A/W in a 7-µm long device with a 200-nm absorption layer.
    • Demonstrated a large electric field and uniform light absorption, reducing space charge effects.

    Conclusions:

    • The proposed IECWG MUTC-PD structure significantly enhances photodiode performance.
    • This design offers a promising solution for high-speed optical detection applications.