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Dynamic wavefront distortion in resonant scanners
Applied Optics
|February 24, 2022
Summary
We evaluated two high-frequency resonant scanners, a silicon carbide galvanometric scanner and a microelectromechanical (MEMS) scanner, for dynamic mirror distortion. The MEMS scanner demonstrated low distortion, offering a promising alternative for advanced optical instruments.
Area of Science:
- Optical Engineering
- Materials Science
- Instrumentation
Background:
- Dynamic mirror deformation in resonant scanners degrades optical instrument performance.
- High resonant frequencies are desirable for advanced scanning applications.
- Minimizing dynamic distortion is crucial for maintaining optical quality.
Purpose of the Study:
- To evaluate two resonant scanners with high resonant frequencies (>12 kHz) for low dynamic distortion.
- To compare the performance of a novel silicon carbide galvanometric scanner with a biaxial microelectromechanical (MEMS) scanner.
- To identify the types and magnitudes of wavefront aberrations in each scanner.
Main Methods:
- Tested a galvanometric scanner with a silicon carbide mirror substrate (13.8 kHz resonance).
- Tested a biaxial microelectromechanical (MEMS) scanner (29.4 kHz resonance).
- Measured dynamic deformation and quantified wavefront aberrations for both scanners.
Main Results:
- Galvanometric scanner aberrations dominated by linear oblique astigmatism (90%).
- MEMS scanner aberrations dominated by horizontal coma (30%) and oblique trefoil (27%).
- Both scanners showed linear distortion increase with deflection angle, achieving diffraction-limited performance at specific wavelengths and deflection ranges.
Conclusions:
- The MEMS scanner exhibits small dynamic distortion, making it a promising alternative to galvanometric resonant scanners.
- Silicon carbide offers a viable, less toxic alternative to beryllium for mirror substrates.
- Reducing beam diameter can improve diffraction-limited performance for shorter wavelengths or larger deflection ranges.
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