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Dynamic wavefront distortion in resonant scanners.

Vyas Akondi, Bartlomiej Kowalski, Alfredo Dubra

    Applied Optics
    |February 24, 2022
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    Summary
    This summary is machine-generated.

    We evaluated two high-frequency resonant scanners, a silicon carbide galvanometric scanner and a microelectromechanical (MEMS) scanner, for dynamic mirror distortion. The MEMS scanner demonstrated low distortion, offering a promising alternative for advanced optical instruments.

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    Area of Science:

    • Optical Engineering
    • Materials Science
    • Instrumentation

    Background:

    • Dynamic mirror deformation in resonant scanners degrades optical instrument performance.
    • High resonant frequencies are desirable for advanced scanning applications.
    • Minimizing dynamic distortion is crucial for maintaining optical quality.

    Purpose of the Study:

    • To evaluate two resonant scanners with high resonant frequencies (>12 kHz) for low dynamic distortion.
    • To compare the performance of a novel silicon carbide galvanometric scanner with a biaxial microelectromechanical (MEMS) scanner.
    • To identify the types and magnitudes of wavefront aberrations in each scanner.

    Main Methods:

    • Tested a galvanometric scanner with a silicon carbide mirror substrate (13.8 kHz resonance).
    • Tested a biaxial microelectromechanical (MEMS) scanner (29.4 kHz resonance).
    • Measured dynamic deformation and quantified wavefront aberrations for both scanners.

    Main Results:

    • Galvanometric scanner aberrations dominated by linear oblique astigmatism (90%).
    • MEMS scanner aberrations dominated by horizontal coma (30%) and oblique trefoil (27%).
    • Both scanners showed linear distortion increase with deflection angle, achieving diffraction-limited performance at specific wavelengths and deflection ranges.

    Conclusions:

    • The MEMS scanner exhibits small dynamic distortion, making it a promising alternative to galvanometric resonant scanners.
    • Silicon carbide offers a viable, less toxic alternative to beryllium for mirror substrates.
    • Reducing beam diameter can improve diffraction-limited performance for shorter wavelengths or larger deflection ranges.