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Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure
Chuanguo Xiong1, Pengjun Zeng1, Weishan Lv1
1School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
Micromachines
|February 25, 2022
Summary
This study optimized a novel micro-electro-mechanical systems (MEMS) tuning fork gyroscope. Structural modifications improved Coriolis vibration transmission efficiency by 18% and reduced modal frequency, enhancing mechanical sensitivity.
Area of Science:
- Micro-electro-mechanical systems (MEMS)
- Mechanical Engineering
- Sensor Technology
Background:
- Improving the mechanical sensitivity of MEMS tuning fork gyroscopes is crucial for enhanced performance.
- Existing research focuses on mode matching and quality factor enhancement.
- This work addresses structural optimization for improved vibration transmission.
Purpose of the Study:
- To design and optimize a novel MEMS tuning fork gyroscope microstructure.
- To analyze mode shapes and optimize decoupling structures and dimensions.
- To enhance the transmission efficiency of Coriolis vibration and reduce working modal frequency.
Main Methods:
- Comparative analysis of vibration performance for different structural designs.
- Implementation of slotting in the base to improve Coriolis vibration transmission.
- Application of the Taguchi method for optimizing gyroscope feature sizes.
Main Results:
- Slotting the base improved Coriolis vibration transmission efficiency.
- Arc slots between tines reduced working modal order and frequency.
- Optimized gyroscope showed an 18% increase in Coriolis vibration transmission efficiency and a 2.7 kHz reduction in modal frequency.
Conclusions:
- The proposed structural and size optimizations significantly enhance gyroscope performance.
- Improved Coriolis vibration transmission and reduced modal frequency contribute to higher mechanical sensitivity.
- This optimized MEMS tuning fork gyroscope design offers superior performance characteristics.
