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Recombination Dynamics in Thin-film Photovoltaic Materials via Time-resolved Microwave Conductivity

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A Thermoelectric MEMS Microwave Power Sensor with Inline Self-Detection Function.

Jiaqi Liu¹, Yang Hong¹, Jutao Wang²

¹Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China.

|February 25, 2022

Summary

This summary is machine-generated.

This study presents a novel thermoelectric MEMS microwave power sensor with self-detection capabilities. The sensor demonstrates reliable performance and minimal bias voltage impact on sensitivity, validating its design.

Keywords:

MEMS microwave power sensor self-detection thermoelectric

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Thermal Measurement Techniques in Analytical Microfluidic Devices

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Area of Science:

Microwave Engineering
Microelectromechanical Systems (MEMS)
Thermoelectric Devices

Background:

Accurate microwave power measurement is critical in various electronic systems.
Existing sensors may lack integrated self-detection or efficient power management.
Thermoelectric sensors offer a passive approach to power sensing.

Purpose of the Study:

To design, fabricate, and measure a novel thermoelectric MEMS microwave power sensor.
To incorporate an inline self-detection function for enhanced functionality.
To evaluate the sensor's performance, including sensitivity and the impact of bias voltage.

Main Methods:

The sensor integrates a coplanar waveguide, thermopile, and specialized resistors for voltage division.
Fabrication is compatible with Gallium Arsenide Monolithic Microwave Integrated Circuit (GaAs MMIC) technology.
On-chip performance was validated using a dedicated microwave experimental platform.

Main Results:

The sensor exhibits a reflection loss below -10 dB across the 0.1-10 GHz frequency range.
Sensitivity was measured at approximately 47.39 μV/mW at 5 GHz and 32.58 μV/mW at 10 GHz.
The impact of bias voltage on sensitivity was found to be less than 0.5%, confirming design robustness.

Conclusions:

The developed thermoelectric MEMS microwave power sensor with inline self-detection is effective.
The design minimizes DC power consumption, improving measurement accuracy and theoretical agreement.
The sensor's performance validates the proposed design for practical applications.