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Updated: Oct 1, 2025

Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
Published on: April 13, 2016
A wide-field micro-computed tomography detector: micron resolution at half-centimetre scale
Maksim A Yakovlev1, Daniel J Vanselow1, Mee Siing Ngu1
1Department of Pathology, Penn State College of Medicine, Hershey, Pennsylvania, USA.
A novel detector system achieves 0.5 µm pixel size with a 6 mm field of view for micro-CT (computed tomography) imaging. This breakthrough enables high-resolution 3D imaging of large biological and material samples without extensive sectional scanning.
Area of Science:
- * X-ray imaging and tomography
- * Biological and materials science imaging
- * Detector technology development
Background:
- * Current micro-CT (computed tomography) systems achieve sub-micron resolution only for fields of view less than 2 mm.
- * Imaging large samples (mm to cm) with micron-scale structures requires a balance between wide field of view and high resolution.
- * Existing technologies necessitate sectional scanning and computational stitching for large specimens, increasing complexity and time.
Purpose of the Study:
- * To present a unique detector system for micro-CT imaging.
- * To achieve a wide field of view (6 mm) combined with sub-micron pixel resolution (0.5 µm).
- * To demonstrate the system's capability with both synchrotron and commercial X-ray sources.
Main Methods:
- * Development and implementation of a novel detector system with a 6 mm image circle and 0.5 µm pixel size.
- * Imaging of a resolution-test pattern and a whole adult Daphnia magna at the Berkeley Advanced Light Source.
- * Reconstruction of large isotropic volumes (10000 × 10000 × 7096 voxels) at 0.5 µm resolution over a 5.0 mm × 3.5 mm field of view.
Main Results:
- * Achieved a 0.5 µm pixel size within a 6 mm field of view.
- * Reconstructed volumes with isotropic 0.5 µm voxels, demonstrating high-resolution 3D imaging of large samples.
- * Measured spatial resolution of 0.90 µm in the projection domain, largely Nyquist-limited.
Conclusions:
- * The developed detector system offers an unprecedented combination of field of view and resolution for micro-CT.
- * Significantly reduces the need for sectional scans and stitching for large, complex samples.
- * Expected to advance research in biological sciences, materials science, microelectronics, agricultural science, and biomedical engineering.
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