Related Experiment Video
Updated: Sep 30, 2025

10:25
Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
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Correction to "Sub-5 nm Lithography with Single GeV Heavy Ions Using Inorganic Resist"
Nano Letters
|March 14, 2022
Abstract
No abstract available in PubMed .

