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The Effect of Heavy Fe-Doping on 3D Growth Mode and Fe Diffusion in GaN for High Power HEMT Application

Jin-Ji Dai1,2, Thi Thu Mai1, Umeshwar Reddy Nallasani1

  • 1Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan.

Materials (Basel, Switzerland)
|March 25, 2022
PubMed

Keywords:
3D growthFe dopingGaN power HEMTMOCVDdiffusionnano-mask

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