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Atomic Layer Deposited Ti2 O3 Thin Films.

K Manjunath1, A Saraswat1, D Samrat1

  • 1International Centre for Materials Science, New Chemistry Unit, School of Advanced Materials, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur P. O., Bengaluru, 560064, India.

Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry
|March 25, 2022
PubMed
Summary
This summary is machine-generated.

Atomic layer deposition prepared Ti2O3 thin films exhibit an insulator-metal transition around 80 K. This transition, driven by the two-band model and crystallographic ratio, significantly alters electrical resistivity with temperature.

Keywords:
Ti2O3atomic layer depositioncorundum structureinsulator-metal transitionthin films

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Area of Science:

  • Materials Science
  • Solid State Physics
  • Thin Film Technology

Background:

  • Titanium sesquioxide (Ti2O3) is a well-known strongly correlated electron material.
  • Understanding its electrical properties is crucial for potential applications.

Purpose of the Study:

  • To investigate the electrical resistivity of Ti2O3 thin films.
  • To analyze the insulator-metal transition in these films.

Main Methods:

  • Atomic Layer Deposition (ALD) for thin film preparation.
  • Electrical resistivity measurements as a function of temperature.

Main Results:

  • Ti2O3 thin films were successfully prepared and found to be stable for up to three weeks.
  • An insulator-metal transition was observed at approximately 80 K.
  • A significant resistivity change of 3-4 orders of magnitude was recorded during the transition.
  • The observed anomalous resistivity increase aligns with the predictions of the two-band model.

Conclusions:

  • The crystallographic c/a ratio influences the energy band interval, thereby affecting the temperature-dependent electrical resistivity.
  • Ti2O3 thin films demonstrate a distinct insulator-metal transition behavior.
  • The findings contribute to the understanding of correlated electron systems and thin film properties.