Design and fabrication of SU-8 polymer arrayed waveguide gratings based on flexible PDMS substrates

We investigated and fabricated 1×8 and 1×16 traditional/saddle arrayed waveguide grating (AWG) wavelength division multiplexing devices on flexible substrates. The core layer was made of the negative epoxy photoresist SU-8, and polydimethylsiloxane (PDMS) material was selected for the cladding based on the high refractive index difference. A chemical modification method of PDMS was proposed to enhance the film-forming characteristics of the SU-8 core layer on PDMS substrates. After fabricating and characterizing the optical properties of the AWGs, the dimensions of the proposed 1×8 and 1×16 AWGs were 0.9×0.8cm² and 1.1×0.9cm², respectively. Experimental results showed that the saddle-type 1×8 and 1×16 AWGs had good signal transmission characteristics, and the insertion losses were only 5.1 dB and 6.8 dB, respectively, which were lower than those of traditional-type AWGs with the same dimensions and number of waveguides.