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Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System.

Fahu Xu^1,2, Dayong Qiao^1,2,3, Changfeng Xia⁴

¹Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China.

|March 26, 2022

Summary

This study introduces a novel design for reconfigurable angular resolution in Micro-Electro-Mechanical Systems (MEMS) Light Detection and Ranging (LiDAR) systems. The method allows for flexible adjustment of resolution, enhancing 3D measurement capabilities.

Keywords:

MEMS LiDAR reconfigurable angular resolution separate-axis Lissajous scanning

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Area of Science:

Optoelectronics
Mechanical Engineering
Robotics

Background:

Micro-Electro-Mechanical Systems (MEMS) based Light Detection and Ranging (LiDAR) offers a cost-effective and compact solution for 3D measurement applications.
Achieving high and adaptable angular resolution is crucial for enhancing the performance of MEMS LiDAR systems.

Purpose of the Study:

To propose and validate a reconfigurable angular resolution design method for a separate-axis Lissajous scanning MEMS LiDAR system.
To identify and analyze the key factors influencing angular resolution in MEMS LiDAR.

Main Methods:

Developed a design methodology focusing on the interplay between MEMS mirror characteristics, laser parameters (duty cycle, pulse width), signal processing, control precision, and laser divergence.
Conducted simulations to determine conditions for achieving specific angular resolutions.
Performed experimental validation using MEMS mirrors with varying characteristics.

Main Results:

Identified critical influence factors on angular resolution, including MEMS mirror properties and laser parameters.
Demonstrated experimental achievement of distinct angular resolutions (0.2° × 0.62° and 0.2° × 0.15° horizontal × vertical).
Validated the feasibility of the proposed design method for reconfigurable angular resolution.

Conclusions:

The proposed design method enables flexible and high angular resolution in MEMS LiDAR systems.
This research paves the way for advanced MEMS LiDAR applications requiring adaptable 3D measurement precision.