Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller

Area of Science:

• Control Systems Engineering
• Micro-Electro-Mechanical Systems (MEMS)

Background:

• MEMS gyroscope performance is limited by mechanical imperfections, environmental variations, and thermal noise.
• Compensation strategies are crucial for improving MEMS gyroscope accuracy and reliability.
• Closed-loop control systems offer a viable solution for gyroscope performance enhancement.

Purpose of the Study:

• To implement and evaluate a proxy-based sliding mode control (SMC) system for MEMS gyroscope drive-axis control.
• To investigate the novelty and effectiveness of proxy-based SMC in gyroscope applications.
• To compare the performance of proxy-based SMC against classical SMC methods.

Main Methods:

• Implementation of a closed-loop control system for a MEMS gyroscope.
• Application of a proxy-based sliding mode control approach for the gyroscope drive axis.
• Comparative analysis between proxy-based SMC and classical SMC.

Main Results:

• The proxy-based SMC demonstrates robustness against model uncertainties and external disturbances.
• Simulation results show a 49.52% reduction in system error and a 12.03% reduction in total gyroscope error compared to classical SMC.
• Experimental data validates the superior performance of the proxy-based SMC.

Conclusions:

• Proxy-based SMC is a novel and effective control strategy for MEMS gyroscopes.
• The proposed method offers significant improvements in accuracy and robustness over traditional SMC.
• The ease of implementation and reduced chattering make proxy-based SMC a promising solution for gyroscope control.