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Contact Printing of Multilayered Thin Films with Shape Memory Polymers
Soyoun Kim1, Nan Liu1, Alexander A Shestopalov1
1Department of Chemical Engineering, University of Rochester, Rochester, New York 14625, United States.
ACS Nano
|March 30, 2022
Summary
Researchers developed a novel transfer printing method for multilayered thin films using shape memory stamps. This technique achieves high resolution and efficiency for microscale electronic device fabrication.
Area of Science:
- Materials Science
- Nanotechnology
- Additive Manufacturing
Background:
- Microarray fabrication is crucial for advanced electronic devices.
- Existing transfer printing methods face challenges in resolution and efficiency.
- Multilayered organic-inorganic thin films offer unique electronic properties.
Purpose of the Study:
- To present a new transfer printing method for multilayered organic-inorganic thin films.
- To achieve high-resolution patterning and efficient material transfer.
- To demonstrate the applicability of shape memory materials in microfabrication.
Main Methods:
- Utilized shape memory printing stamps and microstructured donor substrates.
- Integrated physical vapor deposition with shape memory elastomer adhesion modulation.
- Employed polyurethane-acrylate stamps and silicon/silicon oxide donor substrates.
Main Results:
- Achieved high lateral and feature-edge resolution in printed microarrays.
- Demonstrated high transfer efficiency from donor to receiver substrates.
- Successfully printed thin-film stacks with micrometer lateral dimensions and sub-200 nm thickness.
Conclusions:
- The developed method enables precise and efficient transfer printing of microscale thin films.
- Shape memory materials offer a versatile approach for advanced microfabrication techniques.
- This technique holds potential for large-area manufacturing of complex electronic devices.

