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    Area of Science:

    • Optomechanics
    • Micro-electro-mechanical systems (MEMS)
    • Sensor technology

    Background:

    • Traditional accelerometers face limitations in sensitivity and size.
    • Developing compact, high-resolution inertial sensors is crucial for various applications.

    Purpose of the Study:

    • To present a novel portable and high-resolution optomechanical accelerometer.
    • To demonstrate a unique micro-electro-mechanical system (MEMS) interferometer design for enhanced performance.

    Main Methods:

    • Fabrication of a deformable grating-based MEMS interferometer.
    • Integration of a low-frequency vertical sensing structure with a 3D-spring construction for the movable mirror.
    • Packaging the sensor components into a compact metal case (4 cm × 6 cm × 3.15 cm).

    Main Results:

    • Achieved a high mechanical sensitivity of 893.23 µm/g.
    • Demonstrated a self-noise level below 2 ng/√Hz within the 2–7 Hz frequency range.
    • Measured a significant voltage responsivity of 15,874 V/g.

    Conclusions:

    • The developed optomechanical accelerometer exhibits superior sensitivity and low noise.
    • The novel 3D-spring MEMS structure represents a significant advancement in accelerometer design.
    • This device is among the most sensitive accelerometers reported, with potential for widespread use.