Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

Atomic Emission Spectroscopy: Lab01:29

Atomic Emission Spectroscopy: Lab

262
AES is a powerful analytical technique, especially effective when used with plasma sources, producing abundant spectra in characteristic emission lines. The Inductively Coupled Plasma (ICP), in particular, yields superior quantitative analytical data due to its high stability, low noise, low background, and minimal interferences under optimal experimental conditions. However, newer air-operated microwave sources are emerging as promising alternatives that could be more cost-effective than...
262
Electrospray Ionization (ESI) Mass Spectrometry01:12

Electrospray Ionization (ESI) Mass Spectrometry

1.3K
Higher molecular weight biomolecules are nonvolatile compounds that may decompose before ionizing or vaporizing during mass analysis with conventional electron impact ionization methods. Accordingly, electrospray ionization (ESI) is the favored method for vaporizing and ionizing biomolecules as it circumvents rapid fragmentation and enables the recording of mass signals for the entire biomolecule.
ESI utilizes electrical energy to transfer ions from the liquid phase of the sample into the...
1.3K
Atomic Emission Spectroscopy: Overview01:20

Atomic Emission Spectroscopy: Overview

2.7K
Atomic emission spectroscopy (AES) is an analytical technique used to determine the elemental composition of a sample by analyzing the light emitted from excited atoms. In AES, atoms in a sample are excited to higher energy levels by thermal energy from high-temperature sources, such as plasma, arcs, or sparks. When these excited atoms return to lower energy states, they emit light at specific wavelengths characteristic of each element. The resulting atomic emission spectrum, which consists of...
2.7K
Atomic Spectroscopy: Absorption, Emission, and Fluorescence01:23

Atomic Spectroscopy: Absorption, Emission, and Fluorescence

1.5K
Atomic spectroscopy is a vital tool in elemental analysis, both qualitatively and quantitatively. It can be broadly divided into optical spectroscopy, mass spectroscopy, and X-ray spectroscopy methods. The optical spectroscopic methods are atomic absorption spectroscopy (AAS), atomic emission spectroscopy (AES), and atomic fluorescence spectroscopy (AFS). The first step in all three methods is atomization, where the solid, liquid, or solution-phase samples are converted into gas-phase atoms and...
1.5K
Atomic Emission Spectroscopy: Instrumentation01:22

Atomic Emission Spectroscopy: Instrumentation

661
The instrumentation of atomic emission spectrometry (AES) involves various components, including atomization devices that convert samples into gas-phase atoms and ions. There are two main types of atomization devices: continuous and discrete atomizers.  Continuous atomizers, like plasmas and flames, introduce samples in a constant stream, while discrete atomizers inject individual samples using syringes or autosamplers. The most common discrete atomizer is the electrothermal atomizer.
661
Scanning Electron Microscopy01:07

Scanning Electron Microscopy

4.5K
A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
Accelerated...
4.5K

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

High-efficiency second-harmonic generation in ultra-compact Z-cut lithium niobate waveguides via lateral selective domain engineering.

Optics express·2026
Same author

Genomic divergence, adaptation, and the genetic basis of quality traits in ancient walnut landraces and wild relatives.

Horticulture research·2026
Same author

Selective Am(III)/Eu(III) Separation by Asymmetric Phenanthroline Derivatives with Lateral Phosphonate and Pyrazole Groups.

Inorganic chemistry·2026
Same author

Prediction of axial elongation in adults with high myopia: the Wenzhou High Myopia Cohort Study.

Eye and vision (London, England)·2026
Same author

Study on the canopy structure and light distribution of <i>Hippophae rhamnoides</i> at different ages.

Frontiers in plant science·2026
Same author

Mg(OH)â‚‚ shells drive reactive sintering to form spinel network and stabilize heavy metals in secondary aluminum dross.

Journal of hazardous materials·2026

Related Experiment Video

Updated: Sep 27, 2025

Dependence of Laser-induced Breakdown Spectroscopy Results on Pulse Energies and Timing Parameters Using Soil Simulants
08:53

Dependence of Laser-induced Breakdown Spectroscopy Results on Pulse Energies and Timing Parameters Using Soil Simulants

Published on: September 23, 2013

11.5K

Comparing three quantification methods on N/Si ratio analysis using electron energy loss spectroscopy (EELS).

Xue Rui1, Yun-Yu Wang1, Shixin Wang1

  • 1Micron Technology Inc., 8000 S Federal Way, Boise, ID 83716, USA.

Micron (Oxford, England : 1993)
|April 7, 2022
PubMed
Summary
This summary is machine-generated.

The jump ratio method accurately quantifies elements using electron energy loss spectroscopy (EELS) by minimizing thickness variations. This technique improves elemental analysis in advanced materials like 3D NAND wafers.

Keywords:
3D NANDEELSFourier-log deconvolutionJump ratioQuantitative composition analysisSTEM

More Related Videos

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
07:10

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

Published on: April 29, 2020

1.8K
Quantitative Analysis of Vacuum Induction Melting by Laser-induced Breakdown Spectroscopy
03:49

Quantitative Analysis of Vacuum Induction Melting by Laser-induced Breakdown Spectroscopy

Published on: June 10, 2019

7.4K

Related Experiment Videos

Last Updated: Sep 27, 2025

Dependence of Laser-induced Breakdown Spectroscopy Results on Pulse Energies and Timing Parameters Using Soil Simulants
08:53

Dependence of Laser-induced Breakdown Spectroscopy Results on Pulse Energies and Timing Parameters Using Soil Simulants

Published on: September 23, 2013

11.5K
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
07:10

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

Published on: April 29, 2020

1.8K
Quantitative Analysis of Vacuum Induction Melting by Laser-induced Breakdown Spectroscopy
03:49

Quantitative Analysis of Vacuum Induction Melting by Laser-induced Breakdown Spectroscopy

Published on: June 10, 2019

7.4K

Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Electron Energy Loss Spectroscopy (EELS) is crucial for nano-scale elemental analysis in advanced materials.
  • Sample thickness variations introduce significant errors in EELS quantification due to electron plural scattering.
  • Accurate elemental analysis is vital for industrial applications and scientific research.

Purpose of the Study:

  • To compare and identify the most effective method for minimizing thickness effects in EELS quantification.
  • To evaluate Fourier-log deconvolution, Jump ratio, and Si K-edge methods.
  • To validate the chosen method for analyzing nitride layers in 3D NAND structures.

Main Methods:

  • Quantification of the N/Si ratio across varying sample thicknesses using a standard Si3N4 crystal.
  • Comparison of Fourier-log deconvolution, Jump ratio, and Si K-edge techniques.
  • Application of the optimal method to analyze nitride layers in 3D NAND trench and blanket wafers.

Main Results:

  • The Jump ratio method demonstrated superior accuracy and efficiency compared to Fourier-log deconvolution and Si K-edge.
  • It requires minimal spectroscopy instrument prerequisites and offers short data acquisition times.
  • Successful correction of thickness effects was achieved in 3D NAND wafer analysis, significantly reducing relative error.

Conclusions:

  • The Jump ratio method is highly effective for accurate, thickness-independent elemental quantification via EELS.
  • This technique enhances the reliability of EELS for analyzing complex material structures like 3D NAND.
  • The Jump ratio method offers a practical solution for industrial and research-based nano-scale elemental analysis.