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Updated: Sep 27, 2025

Author Spotlight: Advancements in High-Performance Thermoelectric Thin Films Through Radio Frequency Magnetron Sputtering
Published on: May 17, 2024
Microstructure and Antimicrobial Properties of Zr-Cu-Ti Thin-Film Metallic Glass Deposited Using High-Power Impulse
Jian-Fu Tang1, Po-Yuan Huang2, Ja-Hon Lin1
1Department of Electro-Optical Engineering, National Taipei University of Technology, Taipei City 106, Taiwan.
Abstract:
Zr-Cu based thin-film metallic glass (TFMG) has good glass-forming ability and the addition of a third element can create a chaotic system capable of inhibiting the nucleation and growth of crystals. This study focused on TFMGs made with Zr, Cu, and Ti in various compositions deposited via high-impulse magnetron sputtering on silicon and 304 stainless-steel substrates. Detailed analysis was performed on the microstructure and surface characteristics of the resulting coatings. Transmission electron microscopy revealed that the multilayer structure changed to a nanocrystalline structure similar to an amorphous coating. The excellent hydrophobicity of Zr-Cu-Ti TFMGs can be attributed to their ultra-smooth surface without any grain boundaries. The excellent antimicrobial effects can be attributed to a hydrophobic surface resisting cell adhesion and the presence of copper ions, which are lethal to microbes.
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