Multi-Foci Laser Separation of Sapphire Wafers with Partial Thickness Scanning

Celescia Siew Mun Lye1,2, Zhongke Wang1,3,4, Yee Cheong Lam1,2

  • 1SIMTech-NTU Joint Laboratory (Precision Machining), Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.

Micromachines
|April 23, 2022
PubMed