Design and Performance Analysis of a Micro-Displacement Worktable Based on Flexure Hinges.

Area of Science:

• Mechanical Engineering
• Nanotechnology
• Precision Engineering

Background:

• Flexure hinges are crucial for micro-displacement adjustment devices due to their high resolution, accuracy, and repeatability.
• Existing devices often face limitations in adjustment range and precision.

Purpose of the Study:

• To design and analyze a micro-displacement worktable with four degrees of freedom (X, Z translation and X, Z rotation).
• To improve the adjustment ranges and accuracy of flexure hinges for enhanced performance.

Main Methods:

• Design of a micro-displacement worktable incorporating three distinct types of flexure hinges.
• Performance evaluation using Finite Element Analysis (FEA) to simulate displacement and angular adjustments.
• Development of a dedicated test platform for experimental validation.

Main Results:

• The worktable achieved maximum displacements of 1.67 µm (X) and 1.74 µm (Z).
• Maximum angular adjustments reached 14.90° (X) and 18.58° (Z).
• FEA simulation results demonstrated strong agreement with experimental data.

Conclusions:

• The designed micro-displacement worktable effectively utilizes flexure hinges to achieve precise multi-DOF motion control.
• The study validates the performance through both simulation and experimental testing, confirming the design's efficacy.