Simulation and Optimization of a Planar-Type Micro-Hotplate with Si₃N₄-SiO₂ Transverse Composite Dielectric Layer and...

Micro-hotplates (MHPs) have become widely used basic structures in many micro sensors and actuators. Based on the analysis of the general heat transfer model, we propose a new MHP design based on a transversal composite dielectric layer, consisting of different heat transfer materials. Two general proven materials with different thermal conductivity, Si₃N₄ and SiO₂, are chosen to form the composite dielectric layer. An annular heater is designed with a plurality of concentric rings connected with each other. The relationship between MHP performance and its geometrical parameters, including temperature distribution and uniformity, thermal deformation, and power dissipation, has been fully investigated using COMSOL simulation. The results demonstrate that the new planar MHP of 2 μm thick with a Si₃N₄-SiO₂ composite dielectric layer and annular heater can reach 300 °C at a power of 35.2 mW with a mechanical deformation of 0.132 μm, at a large heating area of about 0.5 mm². The introduction of the composite dielectric layer effectively reduces the lateral heat conduction loss and alleviates the mechanical deformation of the planar MHP compared with a single SiO₂ dielectric layer or Si₃N₄ dielectric layer.