Fabrication of a Flexible, Wireless Micro-Heater on Elastomer for Wearable Gas Sensor Applications

Thin-film microdevices can be applied to various wearable devices due to their high flexibility compared to conventional bulk-type electronic devices. Among the various microdevice types, many IoT-based sensor devices have been developed recently. In the case of such sensor elements, it is important to control the surrounding environment to optimize the sensing characteristics. Among these environmental factors, temperature often has a great influence. There are cases where temperature significantly affects the sensor characteristics, as is the case for gas sensors. For this purpose, the development of thin-film-type micro-heaters is important. For this study, a wirelessly driven thin-film micro-heater was fabricated on the flexible and stretchable elastomer, a polydimethylsiloxane (PDMS); the antenna was optimized; and the heater was driven at the temperature up to 102 degrees Celsius. The effect of its use on gas-sensing characteristics was compared through the application of the proposed micro-heater to a gas sensor. The heated SnO₂ nanowire gas sensor improved the performance of detecting carbon monoxide (CO) by more than 20%, and the recovery time was reduced to less than half. It is expected that thin-film-type micro-heaters that can be operated wirelessly are suitable for application in various wearable devices, including those for smart sensors and health monitoring.