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Multi-tasking geometric phase element array based self-referenced vortex interferometer for three-dimensional

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    A new self-referenced optical vortex interferometer uses multi-tasking geometric phase elements for stable 3D topography reconstruction. This advanced interferometry method accurately measures surface elevations and depressions in challenging environments.

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    Area of Science:

    • Optics and Photonics
    • Metrology
    • Nanotechnology

    Background:

    • Interferometry is crucial for 3D topography but susceptible to environmental instability.
    • Conventional two-beam interferometers lack robustness in volatile conditions.

    Purpose of the Study:

    • To develop a stable, self-referenced optical vortex interferometer.
    • To leverage multi-tasking geometric phase elements for enhanced performance.

    Main Methods:

    • Utilized multi-tasking geometric phase elements for vortex filtering and beam deflection.
    • Implemented a self-referenced optical vortex interferometry system.
    • Employed broadband operation for high mode purity.

    Main Results:

    • Successfully reconstructed the 3D topography of a sample.
    • Accurately determined surface elevations and depressions.
    • Achieved convenient and precise measurements in a single static interference pattern.

    Conclusions:

    • The proposed self-referenced optical vortex interferometer offers enhanced stability and accuracy.
    • Multi-tasking geometric phase elements are key to the system's broadband, high-purity performance.
    • This method provides a convenient approach for 3D surface metrology.