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Updated: Sep 25, 2025
07:10
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
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Deep depth profiling using gas cluster secondary ion mass spectrometry: Micrometer topography development and effects
1National Institute of Standards and Technology, Gaithersburg, MD 20899.
Surface and Interface Analysis : SIA
|April 28, 2022
Summary
Secondary ion mass spectrometry (SIMS) depth profiling of thick organic films can create surface topography. A novel staggered sample rotation method minimizes these distortions, improving 3D image quality and depth profile accuracy.
Area of Science:
- Materials Science
- Surface Analysis
- Analytical Chemistry
Background:
- Secondary ion mass spectrometry (SIMS) with argon cluster ion beams is suitable for molecular compositional depth profiling of organic thin films.
- Thicker organic films (>10 μm sputtered depth) can develop micron-scale pillar topography during SIMS analysis.
- This topography negatively impacts sputter yield linearity and depth resolution, distorting 3D reconstructions.
Purpose of the Study:
- To investigate and mitigate the effects of topography formation during SIMS depth profiling of thick organic films.
- To quantitatively assess the impact of micron-scale topography and sample rotation on depth profile quality.
Main Methods:
- Utilized argon cluster beam SIMS for depth profiling of organic thin films.
- Implemented a step-wise, staggered sample rotation technique to minimize topographical distortions.
- Embedded polymer spheres within organic films to serve as internal standards for depth resolution measurements.
Main Results:
- Observed rapid formation of micron-scale pillar topography in thicker organic films (>10 μm sputtered depth).
- Demonstrated that staggered sample rotation effectively minimizes distortions caused by topography.
- Quantitatively measured depth resolution at the film-sphere interface as a function of sputtered depth, correlating it with topographical development and rotation effects.
Conclusions:
- Staggered sample rotation is an effective strategy to improve the quality of SIMS depth profiles for thick organic films by reducing topographical artifacts.
- Understanding and controlling topography is crucial for accurate 3D compositional mapping and analysis of organic materials using SIMS.
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