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Updated: Sep 24, 2025

Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
High-Q Resonator-Inductor Using LiNbO₃ Plate for Frequency Tuning in 1-5 GHz
Abstract:
In this article, a new high quality factor ( Q ) inductor with piezoacoustic plate acoustic wave (PAW) resonators is presented. As indicated by the investigation of the acoustic wave propagation characteristics and transducer materials, the coupling coefficient ( k2 ) of the shear-horizontal plate (SH0) mode that propagates in the LiNbO3 plate increases to 55.7%, which leads to a wide inductive bandwidth of 29%. The longitudinal and transversal spurious modes are inhibited through novel edge reflector design and transducer engineering. The peak inductor quality factor ( [Formula: see text]) of the acoustic resonator-inductor is obtained as 347, and a large range of inductance values are achieved to be up to 49 nH by regulating the interdigital transducer (IDT) number of fingers (NF). It is noteworthy that a larger inductance is realized in a more miniaturized device. Furthermore, the wavelength-scaling-induced physics is investigated for frequency tuning in 1-5 GHz, which reveals the multifrequency ability on a single chip of the SH0 acoustic resonator-inductor.
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