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Synthesis of indium oxide microparticles using aerosol assisted chemical vapour deposition
Firoz Alam1,2, David J Lewis1
1Department of Materials, The University of Manchester Oxford Road Manchester M13 9PL UK david.lewis-4@manchester.ac.uk.
RSC Advances
|May 6, 2022
Abstract:
Microparticles of indium oxide (In2O3) are deposited on glass substrates at 500 °C using aerosol assisted chemical vapour deposition (AACVD). The structural, morphological and optical properties of the as-deposited particles are reported.

