Related Experiment Video
Updated: Sep 24, 2025

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
Structural and morphological tuning of iron oxide polymorphs by ECR plasma-assisted thermal oxidation
Supriya More1, Suyog Raut1, S Premkumar1,2
1Department of Physics, Savitribai Phule Pune University Ganeshkhind Pune 411007 Maharashtra India vlmathe@physics.unipune.ac.in vikasmathe@gmail.com.
Abstract:
The work presented involves the generation of oxygen plasma species at low pressure utilizing an Electron Cyclotron Resonance (ECR) plasma reactor, and their interactions with micron- and nano-sized iron films (M-Fe and N-Fe film respectively) prepared using ethyl cellulose processed at high temperature. A specially designed radiation heater (RH) was used to raise the surface temperature of the film rapidly, exactly at the film interface, where the plasma species interact with the surface. As a result of the interaction of oxygen plasma species and temperature, iron is oxidized to different polymorphs depending on the operating pressure and hence oxygen gas flow rate. The phase, as well as the morphology of the film was controlled by monitoring the oxygen flow rate using the unique Plasma-Assisted Thermal Oxidation (PATO) process. Different polymorphs, viz., Fe3O4, γ-Fe2O3, α-Fe2O3 and different morphologies, such as polygonal, compact facets, wire-like (1D) nanostructures at the surface were obtained for the films processed using PATO. The selected PATO-processed films were investigated for Field Electron Emission (FEE) properties. The 1D-grown surface of iron oxide obtained from the M-Fe film showed a turn-on field of 3 MV m-1 and emission current of 337 μA cm-2, whereas the pyramidal surface morphology obtained using N-Fe film gives a turn-on field of 3.3 MV m-1 with an emission current of 578 μA cm-2.

