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Electrostatic pull-in application in flexible devices: A review

Teng Cai1,2, Yuming Fang1,2, Yingli Fang1,2

  • 1College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing, China.

Beilstein Journal of Nanotechnology
|May 9, 2022
PubMed

Keywords:
MEMSNEM switcheselectrostaticsmicrofluidicspull-in

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