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Diffusion doping route to plasmonic Si/SiO nanoparticles
Sergei S Bubenov1, Sergey G Dorofeev1, Andrei A Eliseev1,2
1Department of Chemistry, Lomonosov Moscow State University 1-3 Leninskie Gory Moscow 119991 Russia dorofeev_sg@mail.ru.
RSC Advances
|May 11, 2022
Summary
We report a novel method for doping semiconductor nanoparticles (SNPs) with phosphorus. This technique allows for controlled impurity incorporation and high electrical activation, enhancing their functionality for advanced materials.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Physics
Background:
- Semiconductor nanoparticles (SNPs) are crucial for functional materials.
- Engineering SNP electronic structure requires advanced doping techniques.
- Post-synthetic doping methods like diffusion offer controlled impurity introduction.
Purpose of the Study:
- To report on the doping of silicon/silicon dioxide (Si/SiO2) SNPs using phosphorus diffusion.
- To investigate the control over impurity incorporation and distribution.
- To confirm the electrical activity and efficiency of the doping process.
Main Methods:
- Annealing Si/SiO2 SNPs in gaseous phosphorus.
- High-resolution transmission electron microscopy (HRTEM) and X-ray diffraction for structural analysis.
- Elemental analysis (e.g., EDX) and thermopower measurements for doping characterization.
Main Results:
- Achieved doping levels up to 10% with controlled impurity incorporation via precursor vapor pressure.
- Confirmed retention of nanocrystallinity and uniform phosphorus distribution within silicon cores.
- Demonstrated electrical activity of phosphorus, with impurity activation efficiencies up to 34%.
Conclusions:
- Diffusion doping of Si/SiO2 SNPs with phosphorus is an effective post-synthetic method.
- The technique allows for precise control over doping levels and impurity distribution.
- High impurity activation efficiencies highlight the potential of this method for advanced nanosilicon-based functional materials.

