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Updated: Sep 23, 2025

Nanostructured Ag-zeolite Composites as Luminescence-based Humidity Sensors
Published on: November 15, 2016
A solution-processed tin dioxide film applicable as a transparent and flexible humidity sensor
Hwai-En Lin1, Yuta Katayanagi2, Tetsuo Kishi1
1Department of Materials Science and Engineering, School of Materials and Chemical Technology, Tokyo Institute of Technology 2-12-1 Ookayama Meguro-ku Tokyo 152-8550 Japan matsushita.n.ab@m.titech.ac.jp.
This study developed a new, template-free tin oxide humidity sensor on glass and flexible plastic. Hot water treatment transformed insulating films into sensitive semiconductors, enabling humidity detection via proton mobility.
Area of Science:
- Materials Science
- Nanotechnology
- Sensor Technology
Background:
- Developing efficient and cost-effective humidity sensors is crucial for environmental monitoring and industrial applications.
- Transparent and flexible humidity sensors are highly desirable for wearable electronics and smart windows.
Purpose of the Study:
- To develop an all-solution-processed, template-free transparent tin oxide humidity sensor on both rigid and flexible substrates.
- To investigate the effect of hot water treatment (HWT) on the sensing properties of tin oxide films.
- To elucidate the mechanism behind the humidity-sensing behavior.
Main Methods:
- Fabrication of transparent tin oxide (SnO2) films on borosilicate glass and polyethylene terephthalate (PET) substrates using a spin-spray process.
- Post-deposition treatment using hot water treatment (HWT) at 100 °C.
- Characterization of film resistivity, semiconductor properties, and humidity sensing performance (sensitivity, response/recovery time).
Main Results:
- As-prepared SnO2 films were insulators, but HWT transformed them into semiconductors with significantly reduced resistivity.
- Humidity sensitivity increased dramatically with increasing relative humidity (RH), with a 35.2-fold and 3.5-fold increase for glass and PET substrates, respectively, at 95% RH compared to 5% RH.
- The sensing mechanism was attributed to the formation of a hydroxyl layer and tin hydroxyl derivatives, providing mobile protons that respond to humidity changes.
Conclusions:
- The developed all-solution-processed SnO2-based humidity sensors exhibit excellent sensing performance and potential for transparent and flexible applications.
- HWT is a critical step for activating the semiconductor properties and enabling humidity sensing.
- The proton conductivity mechanism offers a promising pathway for future humidity sensor development.
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