Nanoprojectile Secondary Ion Mass Spectrometry for Nanometrology of Nanoparticles and Their Interfaces

Nanoscale molecular characterization plays a crucial role in enhancing our insights into fundamental and materials processes occurring at the nanoscale. However, for many traditional techniques, measurements on different ensembles are mixed and the analytical result reflects the average surface composition or arrangement. Advances in nanometrologies that allow for measurements to be differentiated based on the chemical environment examined are critical for accurate analysis. Here, we present a variant of secondary ion mass spectrometry, SIMS, termed nanoprojectile SIMS, NP-SIMS, capable of nanoscale molecular analysis. The technique examines the sample with a suite, 10⁶-10⁷, of individual gold nanoprojectiles (e.g., Au₄₀₀⁴⁺) which stochastically probe the surface. Analysis of coemitted ions from each impact allows for the inspection of colocalized moieties within the ejected volume of a single projectile impact (10-15 nm in diameter). If some of these 10⁶-10⁷ measurements arise from nanodomains of similar composition, data can be grouped based on the detected secondary ions. We applied the method to examine a mixture of three different-sized nanoparticles with identical metal cores (3-5 nm in diameter), differing in the length of the attached ligand (decanetiol, tetradecanethiol, and hexadecanethiol). Using NP-SIMS, we determined the relative abundance of the three particles on the surface and isolated measurements based on the impact parameter between the impacting nanoprojectile and the surface particle, demonstrating that measurements occurring near the center of the particle can be differentiated from those at the particle-particle and particle-substrate interfaces. The results suggest that the described methodology is well-suited for molecular analysis of nanoassemblies and may be applied for tracking defects. Here we demonstrate that, using NP-SIMS, ensemble averaging can be avoided and molecular analysis can be undertaken at a scale below 5 nm, allowing for nanoscale molecular analysis of nano-objects and their interfaces.