UV-Patterning of Ion Conducting Negative Tone Photoresists Using Azide-Functionalized Poly(Ionic Liquid)s

Imen Abdelhedi-Miladi1,2, Damien Montarnal1, Mona M Obadia1

  • 1Université Claude Bernard Lyon 1, Ingénierie des Matériaux Polymères (UMR CNRS 5223), 15 Boulevard Latarjet, 69622 Villeurbanne Cedex, France.

ACS Macro Letters
|May 25, 2022
PubMed

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