Position Detection Method of Piezoelectric Driven Spherical Motor Based on Laser Detection

Zheng Li1,2, Yiding Zhu1, Bo Xie1

  • 1School of Electrical Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, China.

Micromachines
|May 28, 2022
PubMed
Summary

This study introduces a non-contact laser Doppler method for measuring multi-DOF spherical motor angular velocity and rotor position. Experimental results demonstrate high accuracy for precise motor control.

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