Simulation Design of Surface Acoustic Wave Sensor Based on Langasite Coplanar Integration with Multiple Parameters.

Area of Science:

• Materials Science
• Sensor Technology
• Aerospace Engineering

Background:

• Aerospace metallurgy demands multi-parameter sensing in extreme conditions.
• Single-parameter sensors are insufficient for complex aerospace testing requirements.

Purpose of the Study:

• To propose a multi-parameter coplanar integrated surface acoustic wave (SAW) sensor.
• To optimize Langasite (LGS) crystal cuts for simultaneous temperature, pressure, and vibration measurement.
• To design and simulate an integrated sensor for aerospace applications.

Main Methods:

• Analysis of optimal crystal cuts for LGS based on temperature, pressure, and vibration sensitivity.
• Simulation of sensor performance using determined optimal cuts and electrode parameters.
• Layout design of a coplanar integrated structure considering crystal symmetry and frequency separation.

Main Results:

• Identified optimal LGS cuts: (0°, 138.5°, 25°) for temperature, (0°, 138.5°, 30°) for pressure, and (0°, 138.5°, 35°) for vibration.
• Determined optimal interdigital electrode parameters based on orientation and layout.
• Simulated and verified the feasibility of the multi-parameter integrated design.

Conclusions:

• The proposed LGS-based coplanar SAW sensor effectively integrates multi-parameter sensing.
• Optimized crystal cuts and sensor design enable reliable measurement in harsh aerospace environments.
• This integrated sensor design offers a promising solution for advanced aerospace metallurgy testing.