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A MEMS-Based High-Fineness Fiber-Optic Fabry-Perot Pressure Sensor for High-Temperature Application
Suwei Wang1, Jun Wang1, Wenhao Li1
1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Micromachines
|May 28, 2022
Summary
This study introduces a novel fiber-optic Fabry-Perot high-temperature pressure sensor using MEMS technology. The sensor demonstrates high sensitivity and temperature tolerance, suitable for demanding industrial applications.
Area of Science:
- Materials Science
- Optical Engineering
- Sensor Technology
Background:
- High-temperature pressure sensing is critical in various industrial processes.
- Existing sensors often face limitations in accuracy, durability, or operating range.
- MEMS technology offers a pathway to miniaturized and robust sensor designs.
Purpose of the Study:
- To propose and experimentally verify a high-fineness fiber-optic Fabry-Perot pressure sensor.
- To achieve high-temperature tolerance and simplified signal demodulation.
- To explore its application in high-temperature pressure testing.
Main Methods:
- Fabrication of a Fabry-Perot cavity using MEMS technology, anodic bonding of silicon and Pyrex glass.
- Coating the interface with a high-reflection film to enhance interference signals.
- Experimental verification of pressure sensitivity and temperature coefficient.
Main Results:
- The sensor achieved a pressure sensitivity of 55.468 nm/MPa.
- A temperature coefficient of 0.01859 nm/°C was recorded between 25-300 °C.
- The sensor demonstrated high fineness, high temperature tolerance, and high consistency.
Conclusions:
- The developed fiber-optic pressure sensor offers a promising solution for high-temperature environments.
- Its simple demodulation system and robust performance indicate wide application prospects.
- This MEMS-based sensor advances the field of high-temperature pressure measurement.
