Optimization of Optical Phase Profile in Beam Deflector with Advanced Simulation Method for High Diffraction

Andrey Manko1, Young Kim2, Aleksander Morozov1,3

  • 1Samsung R&D Institute Russia, Office 1500, 12 Bldg.1, Dvintsev Str., 127018 Moscow, Russia.

Micromachines
|May 28, 2022
PubMed