A Terahertz Optomechanical Detector Based on Metasurface and Bi-Material Micro-Cantilevers

Terahertz imaging technology has shown great potential in many fields. As the core component of terahertz imaging systems, terahertz detectors have received extensive attention. In this paper, a metasurface-based terahertz optomechanical detector is proposed, which is made of two fabrication-friendly materials: gold and silicon nitride. The optomechanical detector is essentially a thermal detector composed of metasurface absorber, bi-material micro-cantilevers and heat insulation pillars. Compared with traditional thermal terahertz detectors, the optomechanical detector employs a metasurface absorber as the terahertz radiation coupler and obtains an absorptivity higher than 90% from 3.24 to 3.98 THz, which is much higher than that of traditional terahertz detectors with absorbers made from natural materials. Furthermore, the detector is fabricated by MEMS process and its responsivity has been verified by a specifically designed optical read-out system; the measured optomechanical responsivity is 24.8 μm/μW, which agrees well with the multi-physics simulation. These results indicated that the detector can be employed as a pixel to form a terahertz focal plane array in the future, and further realize real-time terahertz imaging at room temperature.