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Fabrication of Zero Mode Waveguides for High Concentration Single Molecule Microscopy
Published on: May 12, 2020
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Gold Ion Beam Milled Gold Zero-Mode Waveguides.
Troy C Messina1, Bernadeta R Srijanto2, Charles Patrick Collier2
1Department of Physics, Berea College, 101 Chestnut Street, Berea, KY 40404, USA.
Nanomaterials (Basel, Switzerland)
|May 28, 2022
Summary
Focused ion beam milling offers a new method for creating zero-mode waveguides (ZMWs). Gold ZMWs produced this way show enhanced fluorescence, matching traditional fabrication techniques for single-molecule microscopy.
Area of Science:
- Optics and Photonics
- Materials Science
- Biophysics
Background:
- Zero-mode waveguides (ZMWs) enhance fluorescence and enable single-molecule studies at physiological concentrations.
- Traditional ZMW fabrication relies on photolithography or electron beam lithography.
- Plasmon enhancement is a key feature of ZMWs for sensitive detection.
Purpose of the Study:
- To introduce a novel fabrication method for zero-mode waveguides (ZMWs) using focused ion beam (FIB) milling.
- To investigate the optical properties of ZMWs fabricated with gold ions.
- To compare the performance of FIB-milled ZMWs with those made by conventional lithography.
Main Methods:
- Focused ion beam (FIB) milling with gold ions was employed for ZMW fabrication.
- Fabrication of ZMWs with 200 nm apertures.
- Characterization of plasmon-enhanced fluorescence from the fabricated ZMWs.
Main Results:
- Successful fabrication of gold ZMWs using FIB milling.
- Demonstration of plasmon-enhanced fluorescence in ion-milled gold ZMWs.
- Comparable fluorescence enhancement to ZMWs produced by electron beam lithography.
Conclusions:
- Focused ion beam milling presents a viable alternative for ZMW fabrication.
- Ion-milled gold ZMWs offer similar optical performance to traditionally fabricated devices.
- This method expands fabrication options for single-molecule fluorescence microscopy applications.

