You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Sep 21, 2025

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
L Vázquez1, A Redondo-Cubero2,3, K Lorenz4,5
1Instituto de Ciencia de Materiales de Madrid (ICMM), CSIC, C/Sor Juana Inés de la Cruz 3, 28049 Madrid, Spain.
Ion beam irradiation (IBI) effectively creates surface nanopatterns on diverse materials. This review focuses on IBI techniques where surface composition is crucial, especially with simultaneous co-deposition of foreign atoms.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: