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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Detection of Volatile Organic Compounds by Using MEMS Sensors

Mohamed Arabi1, Majed Alghamdi2, Khalid Kabel3

  • 1Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada.

Sensors (Basel, Switzerland)
|June 10, 2022
PubMed

Keywords:
MEMSVOCsbifurcationelectrostatic

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