High precision robust control design of piezoelectric nanopositioning platform

The piezoelectric nanopositioning platform requires extremely accurate tracking during the task, while the model uncertainty caused by load variations requires strong robustness of the system. The high accuracy and robustness in the control design are coupled to each other, making it difficult to achieve both optimally at the same time. In addition, the system itself has a weakly damped resonant mode, which makes it extremely difficult to control the piezoelectric nanopositioning platform while suppressing the inherent resonance of the system as well as meeting the requirements for robustness and high accuracy. For the multi-performance integrated control problem of piezoelectric nanopositioning platform, this paper gives two kinds of control designs (integral resonance control (IRC) and H∞ control) satisfying accuracy requirements and robustness, and carries out simulation study and comparative analysis with positive position feedback control (PPF). Simulation results show that the H∞ control strategy given in this paper has the smallest tracking error compared to PPF and IRC under 5, 10 and 20 Hz input grating scan signals, though it has a higher order, with better robustness to mechanical load variations and high frequency signal perturbations in the 0-1000 g load range.