Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Generic generation and manipulation of high-dimensional spin-orbit states in Hilbert space.

Nature communications·2026
Same author

Programmable Optical Megapixel Nano-Kirigami Matrix.

Advanced materials (Deerfield Beach, Fla.)·2026
Same author

Corrigendum to "Mitochondrial ribosomal protein L12 potentiates hepatocellular carcinoma by regulating mitochondrial biogenesis and metabolic reprogramming" [Metabolism. 2024 Mar; 152: 155761. doi:10.1016/j.metabol.2023.155761].

Metabolism: clinical and experimental·2026
Same author

Photonic Intrinsic Chiral Flatband With Tailorable Quality Factor and Circular Dichroism.

Advanced materials (Deerfield Beach, Fla.)·2026
Same author

Digital financial inclusion and household consumption structure upgrading.

Scientific reports·2026
Same author

Destructive Interference Mediated Topological Transitions in Bilayer Metasurfaces.

Physical review letters·2026

Related Experiment Video

Updated: Sep 6, 2025

Ultrahigh Density Array of Vertically Aligned Small-molecular Organic Nanowires on Arbitrary Substrates
08:07

Ultrahigh Density Array of Vertically Aligned Small-molecular Organic Nanowires on Arbitrary Substrates

Published on: June 18, 2013

15.1K

Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication.

Guangzhou Geng1, Zhongshan Zhang1, Chensheng Li1,2

  • 1Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.

Micromachines
|June 24, 2022
PubMed
Summary

This review details atomic layer deposition assisted 3D assembly for fabricating complex 3D nanostructures. This method offers improved control and multifunctionality for advanced nanodevices.

Keywords:
3D nanostructuresatomic layer depositionsacrificial templates

More Related Videos

A Method to Fabricate Disconnected Silver Nanostructures in 3D
05:45

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Published on: November 27, 2012

13.8K
Atomically Traceable Nanostructure Fabrication
12:35

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

8.8K

Related Experiment Videos

Last Updated: Sep 6, 2025

Ultrahigh Density Array of Vertically Aligned Small-molecular Organic Nanowires on Arbitrary Substrates
08:07

Ultrahigh Density Array of Vertically Aligned Small-molecular Organic Nanowires on Arbitrary Substrates

Published on: June 18, 2013

15.1K
A Method to Fabricate Disconnected Silver Nanostructures in 3D
05:45

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Published on: November 27, 2012

13.8K
Atomically Traceable Nanostructure Fabrication
12:35

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

8.8K

Area of Science:

  • Physics, Chemistry, Engineering, and Biology

Background:

  • Three-dimensional (3D) nanostructures offer superior functionalities compared to planar counterparts.
  • Current fabrication methods for 3D nanostructures face challenges in reliability, controllability, and multifunction integration.
  • There is a growing demand for advanced 3D nanostructures in commercial nanodevices.

Purpose of the Study:

  • To provide a comprehensive overview of 3D nanofabrication using atomic layer assembly (ALA).
  • To review fabrication methods based on ALA with various sacrificial templates for 3D nanostructures.
  • To highlight recent advancements and unlock the potential of ALA for nanodevice applications.

Main Methods:

  • Atomic layer deposition (ALD) assisted 3D assembly.
  • Utilizing various sacrificial templates to guide nanostructure formation.
  • Reviewing existing literature and recent advancements in ALA for 3D nanofabrication.

Main Results:

  • ALD-assisted 3D assembly enables the fabrication of complex 3D nanostructures.
  • The method demonstrates potential for reliable fabrication with improved controllability.
  • Multifunction integration in 3D nanostructures is achievable through this technique.

Conclusions:

  • Atomic layer assembly provides a powerful route for fabricating advanced 3D nanostructures.
  • This fabrication method holds significant promise for future nanodevice applications.
  • Further research can unlock the full potential of ALA in diverse scientific and engineering fields.