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Related Experiment Video

Updated: Sep 6, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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All-Solid-State Beam Steering via Integrated Optical Phased Array Technology.

Shi Zhao1, Jingye Chen1, Yaocheng Shi1

  • 1State Key Laboratory for Modern Optical Instrumentation, Center for Optical and Electromagnetic Research, International Research Center for Advanced Photonics, Ningbo Research Institute, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China.

Micromachines
|June 24, 2022
PubMed
Summary
This summary is machine-generated.

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Integrated optical phased arrays (OPAs) are crucial for all-solid-state beam steering in Light Detection and Ranging (LiDAR) systems. This review covers OPA principles, various solutions, and future challenges for LiDAR applications.

Area of Science:

  • Photonics
  • Optical Engineering
  • Sensor Technology

Background:

  • Light Detection and Ranging (LiDAR) systems integrate radar and laser technologies for navigation and mapping.
  • All-solid-state beam steering is essential for advanced LiDAR performance.
  • Integrated optical phased arrays (OPAs) are key components for achieving this beam steering.

Purpose of the Study:

  • To review the fundamental principles of optical phased arrays (OPAs) for beam steering.
  • To survey recent advancements in various OPA solutions for LiDAR.
  • To highlight progress in photonic integrated chip-based OPAs.

Main Methods:

  • Review of existing literature and research on optical phased arrays.
  • Analysis of different OPA technologies: MEMS, liquid crystal, and metasurface.
Keywords:
beam steeringdiffractionliquid crystalsmicro-electromechanical systemoptical phased arrayphotonic integrated chipsilicon photonics

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  • Focus on the integration of OPAs within photonic integrated circuits.
  • Main Results:

    • Optical phased arrays offer superior performance for beam steering in LiDAR.
    • Photonic integrated chip-based OPAs represent a significant area of recent progress.
    • Various OPA solutions, including micro-electromechanical systems, liquid crystals, and metasurfaces, have been explored.

    Conclusions:

    • All-solid-state beam steering using OPAs is vital for next-generation LiDAR.
    • Photonic integrated circuits are a promising platform for OPA development.
    • Further research is needed to address challenges and unlock the full potential of OPA-based LiDAR.