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Shape, Resonant Frequency and Thermoelastic Dissipation Analysis of Free-Formed Microhemispherical Shells Based on
Yang Gao1,2, Jiachao Zhang1,2, Zhihu Ruan3
1Artificial Intelligence Institute of Industrial Technology, Nanjing Institute of Technology, Nanjing 211167, China.
Micromachines
|June 24, 2022
Summary
This study develops a model to optimize free-form microhemispherical shell resonators. Adjusting preforming parameters improves resonant frequency and reduces thermoelastic dissipation for better device performance.
Area of Science:
- Materials Science
- Mechanical Engineering
- Physics
Background:
- Free-form microhemispherical shell resonators offer high quality factors and mass production potential.
- Current fabrication methods using single molds limit shape adjustability, impacting resonant frequency and quality factor.
Purpose of the Study:
- To establish a process analysis model for free-forming microhemispherical shells.
- To analyze the influence of preforming parameters on shell shape, resonant frequency, and thermoelastic dissipation.
- To provide theoretical guidance for optimizing resonator design.
Main Methods:
- Developed a process analysis model based on the free-forming mechanism.
- Analyzed the effects of preforming parameters on microhemispherical shell geometry.
- Investigated the impact of structural and geometric factors on resonant frequency and thermoelastic dissipation.
Main Results:
- Substrate annular groove depth and pressure ratio influence microhemispherical shell height and thickness.
- Structural thickness directly affects microhemispherical shell thickness.
- These parameters significantly impact the resonator's resonant frequency and thermoelastic dissipation.
Conclusions:
- The model provides theoretical guidance for designing microhemispherical shell resonators.
- Optimizing preforming parameters is crucial for controlling resonant frequency and thermoelastic dissipation.
- Inner diameter of the annular groove has a minor effect on resonator performance.
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