Dynamic Model of a Conjugate-Surface Flexure Hinge Considering Impacts between Cylinders.

Area of Science:

• Mechanical Engineering
• Microelectromechanical Systems (MEMS)
• Nanotechnology

Background:

• Conjugate-Surface Flexure Hinges (CSFH) are crucial components in MEMS/NEMS devices.
• Existing dynamic models lack analysis of surface impacts and friction.
• This gap limits the accurate simulation of CSFH behavior under dynamic conditions.

Purpose of the Study:

• To develop and validate a comprehensive multibody system (MBS) model for CSFH.
• To incorporate elastic forces, friction, and impacts into the dynamic model.
• To analyze the dynamic behavior of CSFH, considering surface interactions.

Main Methods:

• Development of a new MBS model based on cylinder contact mechanics.
• Integration of the Lankarani-Nikravesh constitutive law and Ambrosìo friction model.
• Application of the non-smooth Moreau time-stepping scheme for simulation.

Main Results:

• The proposed MBS model accurately simulates rigid-body dynamics, elastic forces, friction, and impacts.
• Comparison with existing models demonstrates the validity and reliability of the new CSFH model.
• The model provides a more complete understanding of CSFH dynamics in MEMS/NEMS applications.

Conclusions:

• The developed MBS model effectively addresses the limitations of previous CSFH models.
• This research provides a valuable tool for designing and analyzing MEMS/NEMS devices utilizing CSFH.
• The findings contribute to the advancement of micro- and nanotechnology component modeling.