Insight into the Experimental Error in the Mapping of Electrical Properties with Electrostatic Force Microscopy

Shaojie Wang1, Linzhen Fan1, Zhen Luo1

  • 1State Key Laboratory of Power System, Department of Electrical Engineering, Tsinghua University, Beijing 100084, People's Republic of China.

Summary

Surface irregularities in electrostatic force microscopy (EFM) studies can cause errors. This research quantifies these errors and proposes numerical inversion and standard interface configurations to improve EFM accuracy for heterogeneous materials.