Hermetic Welding of an Optical Fiber Fabry-Pérot Cavity for a Diaphragm-Based Pressure Sensor Using CO₂ Laser

A diaphragm-based hermetic optical fiber Fabry-Pérot (FP) cavity is proposed and demonstrated for pressure sensing. The FP cavity is hermetically sealed using one-step CO₂ laser welding with a cavity length from 30 to 100 μm. A thin diaphragm is formed by polishing the hermetic FP cavity for pressure sensing. The fabricated FP cavity has a fringe contrast larger than 15 dB. The experimental results show that the fabricated device has a linear response to the change in pressure, with a sensitivity of -2.02 nm/MPa in the range of 0 to 4 MPa. The results demonstrate that the proposed fabrication technique can be used for fabricating optical fiber microcavities for sensing applications.